JPS63121426U - - Google Patents
Info
- Publication number
- JPS63121426U JPS63121426U JP1244887U JP1244887U JPS63121426U JP S63121426 U JPS63121426 U JP S63121426U JP 1244887 U JP1244887 U JP 1244887U JP 1244887 U JP1244887 U JP 1244887U JP S63121426 U JPS63121426 U JP S63121426U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- single crystal
- crystal layer
- substrate
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1244887U JPS63121426U (en]) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1244887U JPS63121426U (en]) | 1987-01-30 | 1987-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63121426U true JPS63121426U (en]) | 1988-08-05 |
Family
ID=30800583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1244887U Pending JPS63121426U (en]) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63121426U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0289374A (ja) * | 1988-09-27 | 1990-03-29 | Hitachi Constr Mach Co Ltd | シリコン薄膜ピエゾ抵抗素子の製造法 |
-
1987
- 1987-01-30 JP JP1244887U patent/JPS63121426U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0289374A (ja) * | 1988-09-27 | 1990-03-29 | Hitachi Constr Mach Co Ltd | シリコン薄膜ピエゾ抵抗素子の製造法 |